The PECVD system enables single- and multi-layer DLC (Diamond-Like Carbon) thin-film coatings in compliance with military standards. System details and capabilities are as follows:
- Coating capacity up to 585 mm diameter
- Auto-matching RF Plasma source
- High-resistance multispectral optical coatings
- Long-term, durable, and stable operation of optics
- Uniformity < +/- 2.5%
- Raverage < 4% @ 3.4–4.6 µm, DLC Si
- Raverage < 4% @ 8–12 µm, DLC Ge
Other applications:
- Thermal sensor-based metrology, test, and monitoring systems
- Semiconductor technology
- Aerospace fasteners and components
- Medical instruments
- Engine parts and injectors
- Industrial machinery components
- Aluminum and non-ferrous metal forming
- Plastic injection molding tools
- Cutting tools
- Watches and jewelry
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