The Zygo Verifire 4” Phase-Shifting Fizeau Laser Interferometer can perform the following measurements:
- High-precision surface shape defect analysis
- Transmitted wavefront measurement
- 100 mm plano surface inspection capability
- Large-scale spherical surface analysis capability with various TS spheres, including F/# 0.75, 1.5, and 3.3
- Vibration-isolated workspace with a 4.5 m² air-operated optical table
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